Process for preparing trichlorosilane

Details Process for preparing trichlorosilane Process for preparing trichlorosilane

C - Chemistry, Metallurgy

01

B

C01B 33/107 (2006.01) C01B 33/035 (2006.01) C30B 25/02 (2006.01)

Patent

CA 2185981

A process for preparing trichlorosilane by reducing tetrachlorosilane in a fluidized bed reactor has the following steps: a) establishing in the reactor, a fluidized bed of silicon particles; b) heating the silicon particles to a temperature of 300°C to 1100°C by directing microwave radiation into the reactor; c) passing a reaction gas containing tetrachlorosilane and hydrogen through the fluidized bed and reacting the reaction gas with the silicon particles, to form a product gas which contains trichlorosilane and d) removing the product gas from the reactor.

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