Process for producing a solid state radiation detector

Details Process for producing a solid state radiation detector Process for producing a solid state radiation detector

H - Electricity

01

L

H01L 27/14 (2006.01) H01L 27/12 (2006.01)

Patent

CA 2087483

PROCESS FOR PRODUCING A SOLID STATE RADIATION DETECTOR ABSTRACT OF THE DISCLOSURE A process for producing an array of solid state radiation detectors includes depositing on a substrate one or more layers of silicon-based materials and thendepositing a metal layer overlying silicon-based substance. The metal layer is formed into an array of metal layer regions, and then the metal layer is used as a mask to remove exposed adjacent silicon-based substance layers thereby forming an array of silicon-based substance layers that are aligned with the array of metal layers for forming an array of photosensitive sensing devices. The process of the present invention reduces the number of microlithography steps that are used in forming an array of layered amorphous silicon photosensitive devices.

Affiliated with

Also associated with

Rating

Process for producing a solid state radiation detector does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for producing a solid state radiation detector, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for producing a solid state radiation detector will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1428395