Process for producing patterns in dielectric layers formed...

Details Process for producing patterns in dielectric layers formed... Process for producing patterns in dielectric layers formed...

C - Chemistry, Metallurgy

23

C

356/166, 356/178

C23C 16/04 (2006.01) C23C 16/505 (2006.01) C23C 16/509 (2006.01) H01L 21/205 (2006.01) H01L 21/31 (2006.01)

Patent

CA 1333786

A process for forming a dielectric patterned layer of any desired geometry on a selected substrate which includes vapor depositing selected reactants on said substrate only in areas thereon which are coextensive with the surface area of an adjacent metal electrode pattern.

589157

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