Process for producing polycrystalline silicon

Details Process for producing polycrystalline silicon Process for producing polycrystalline silicon

C - Chemistry, Metallurgy

01

B

23/326

C01B 33/02 (2006.01)

Patent

CA 1145117

A B S T R A C T An economical, low temperature, closed loop, thermal decomposition process is provided for producing a controllable mixture of heterogeneously and homogeneously nucleated ultrahigh purity polycrystalline silicon suitable for use in the manufacture of semiconductor devices and photovoltaic solar cells. The pro- cess manipulates the equilibrium expressed by the chemical reaction: Si + 2H2 + 3SiBr4 Image 4SiHBr3.

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