Process for producing thin films of inorganic oxides of...

Details Process for producing thin films of inorganic oxides of... Process for producing thin films of inorganic oxides of...

C - Chemistry, Metallurgy

23

C

C23C 16/40 (2006.01) C23C 14/00 (2006.01) C23C 14/08 (2006.01) H01L 21/316 (2006.01) H01L 39/24 (2006.01)

Patent

CA 2131791

2131791 9318200 PCTABS00025 An in-situ process for preparing thin films which contain volatile and relatively involatile oxides is disclosed, in particular, crystalline thin films of oxides of superconductors or precursors,wherein separate sources of the volatile and relatively involatile oxides during deposition of the thin film are employed.

Affiliated with

Also associated with

Rating

Process for producing thin films of inorganic oxides of... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for producing thin films of inorganic oxides of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for producing thin films of inorganic oxides of... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1675514