C - Chemistry – Metallurgy – 01 – B
Patent
C - Chemistry, Metallurgy
01
B
C01B 21/083 (2006.01) B01D 3/36 (2006.01) C07C 17/38 (2006.01) C07C 19/08 (2006.01)
Patent
CA 2306800
Nitrogen trifluoride (NF3) containing less than 10 parts-per-million molar impurities, e.g., tetrafluoromethane (PFC-14), is disclosed. A zeotropic and extractive distillation processes using entraining agents for separating NF3, and PFC-14 from each other and from mixtures with other electronics industry materials are disclosed.
Cette invention a trait à du trifluorure d'azote (NF¿3?) renfermant moins de 10 parties par million, en concentration molaire, d'impuretés, du tétrafluorométhane (PCF-14), par exemple. Elle concerne également des procédés de distillation azéotropique et extractive faisant intervenir des agents d'entraînement pour séparer le NF¿3? du PCF-14 et séparer ces deux substances d'autres mélanges constitués avec d'autres matériaux relevant du domaine de l'industrie électronique.
Kao Chein-Ping Chai
Mahler Barry Asher
Miller Ralph Newton
Bennett Jones Llp
E.i. Du Pont de Nemours And Company
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