F - Mech Eng,Light,Heat,Weapons – 04 – B
Patent
F - Mech Eng,Light,Heat,Weapons
04
B
F04B 37/08 (2006.01)
Patent
CA 2096419
WO 92/08894 PCT/EP91/01713 91.013 PCT LEYBOLD AKTIENGESELLSCHAFT ABSTRACT The invention relates to a process for regenerating a cryopump (1) that is equipped with an inlet valve (33), with cold surfaces (6, 8, 11) which have a temperature during operation of the pump that effects the condensation and/or adsorption of gases and which are heated for the purpose of regenerating them, the cryopump further including a backing pump (45) that is connected with the pump interior (9) by way of a valve (44). In this process, heating of the cold surfaces begins if the inlet valve (33) is closed and the connection between the pump interior (9) and the connected backing pump (45) is blocked so that, in addition to the temperature of the cold surfaces, the pressure in the pump interior also rises to values that lie above the corresponding values of the triple point of the gas to be removed. The removal of the precipitates released from the cold surfaces is effected in liquid and/or gaseous form through a conduit (46) equipped with a regeneration valve (47) that is actuated as a function of the pressure in the pump interior (9). (Figure 1) - 47 -
Flick Gerd
Forth Hans-Joachim
Hafner Hans-Ulrich
Klein Hans-Hermann
Mundinger Hans-Jurgen
Fetherstonhaugh & Co.
Leybold Aktiengesellschaft
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