Process for removing plastics from microstructures

Details Process for removing plastics from microstructures Process for removing plastics from microstructures

B - Operations, Transporting

08

B

B08B 3/08 (2006.01) B08B 3/10 (2006.01) G03F 7/42 (2006.01)

Patent

CA 2115192

Abstract A process for removing plastics from metallic microstructure elements is disclosed. The process comprises treating the metallic elements at a temperature higher than 140°C with a fluid whose boiling point at atmospheric pressure is higher than 130°C. Examples of suitable fluids are oligomers of ethylene glycol, short-chain diols or esters of dicarboxylic acids. The treatment removes both fusible and infusible plastics without impairing the quality of the metallic microstructures. The process is particularly useful in the LIGA process of manufacturing of metallic microstructures, for delamination of shape-providing plastics.

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