Process for synthesizing a thin film or composition layer...

Details Process for synthesizing a thin film or composition layer... Process for synthesizing a thin film or composition layer...

C - Chemistry, Metallurgy

23

C

C23C 30/00 (2006.01) B32B 15/01 (2006.01)

Patent

CA 2708193

A process for synthesizing a thin film or composition layer from a plurality of precursor layers supported on a substrate, includes exposing the plurality of precursor layers to non-contact pressure, and heating the plurality of precursor layers under the non-contact pressure to a reaction temperature sufficient to promote the formation of the film or composition layer.

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