C - Chemistry – Metallurgy – 30 – B
Patent
C - Chemistry, Metallurgy
30
B
148/2.1, 204/96.
C30B 25/00 (2006.01) C23C 16/26 (2006.01) C23C 16/27 (2006.01) C23C 16/48 (2006.01) C23C 16/50 (2006.01) C23C 16/54 (2006.01) C30B 28/14 (2006.01) C30B 29/04 (2006.01)
Patent
CA 2030486
ABSTRACT OF THE DISCLOSURE Disclosed is a process for synthesizing high quality diamond, at high speed, in a gas phase using carbon monoxide and hydrogen gas as starting gases, which comprises adding an oxygen-containing inorganic gas such as CO2 under conditions where graphite is produced unless the oxygen-containing inorganic gas is added. Also, disclosed is a process for consecutively synthesizing diamond on a plurality of substrates, which comprises placing a plurality of substrates in a pre-chamber, moving each of the substrates into a reaction section, synthesizing diamond on the substrate, and then returning the substrate with a diamond film formed thereon to the pre-chamber. An apparatus adapted to practice the synthesis process is further disclosed.
Hayashi Nariyuki
Katsumata Satoshi
Idemitsu Petrochemical Co. Ltd.
Macrae & Co.
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