Process for the manufacture of an electronic component...

H - Electricity – 01 – F

Patent

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Details

H01F 37/00 (2006.01) H01L 21/02 (2006.01) H01L 21/70 (2006.01) H01L 27/08 (2006.01) H01L 49/02 (2006.01) H01L 21/288 (2006.01) H01L 21/768 (2006.01)

Patent

CA 2409237

L'invention concerne un procédé permettant de fabriquer des composants électroniques incorporant un micro-composant inductif, disposé au dessus d'un substrat. Un tel composant comporte: - une couche (10) de matériau à faible permittivité relative, reposant sur la face supérieure du substrat (1); - un ensemble de spires métalliques (30-31), définies au-dessus de la couche (10) de matériau à faible permittivité relative; - une couche (15) barrière à la diffusion du cuivre, interposée entre les spires métalliques (30-31) et la couche de matériau à faible permittivité relative.

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