Process for the manufacture of pzt films

Details Process for the manufacture of pzt films Process for the manufacture of pzt films

G - Physics

03

G

G03G 5/08 (2006.01) H01L 41/24 (2006.01)

Patent

CA 2128311

A process for producing PZT films on a substrate by thick-film technique in which the PZT films contain simply modified PZT and/or PZT with complex perovskite. PZT with a Zr content X of X ~ X p + 0.02 ~ X p + 0.10 is used, where X p is the Zr content of the base composition at the morphotropic phase boundary determined by the maximum coupling factor K ~.

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