Process for the production of a microtip electron source and...

H - Electricity – 01 – J

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H01J 17/49 (2006.01) H01J 1/304 (2006.01) H01J 9/02 (2006.01)

Patent

CA 2146528

DESCRIPTIVE ABSTRACT Process for the production of microtip electron sources and microtip electron source obtained by said process. This process for the production of an electron source comprising a system of cathode conductors (8), grids (10a) superimposed with an intermediate insulator (23), and microtips (18) deposited on the cathode conductors, the grids being geometrically located between a lower plane (I) and an upper plane (S) is characterized in that the micro- tips undergo a first cleaning stage and then a finishing or improving stage by surface etching. Application to a two-part microtip structure. (Fig. 8b)

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