Process for the production of bismuth-substituted...

Details Process for the production of bismuth-substituted... Process for the production of bismuth-substituted...

C - Chemistry, Metallurgy

23

C

204/96.1

C23C 14/08 (2006.01) H01F 10/24 (2006.01) H01F 41/18 (2006.01)

Patent

CA 1274804

ABSTRACT A process for the production of bismuth-substituted ferrimagnetic garnet films. A process for the production of bismuth-substituted ferrimagnetic garnet films by HF cathode sputtering using a target containing the elements involved in the build-up of the film in the form of oxides and bismuth in the form of an oxide compound with a certain stoichiometry, bismuth and at least one element involved in the film build-up, which element has a sputtering rate distinctly lower than the sputtering rate for bismuth, being incorporated at fixed lattice sites. The use of a magnetron cathode is an advantage.

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