Process for the production of ceramic substrates for thin...

C - Chemistry – Metallurgy – 04 – B

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C04B 35/111 (2006.01) C04B 35/64 (2006.01) H01L 21/48 (2006.01)

Patent

CA 1050739

A B S T R A C T A process for the production of ceramic substrates for thin layer circuits utilizes a cast compound which may be transformed-into a ceramic body by sintering. The compound is poured out in the form of a coating on a base, for drying whereupon a leather-like, tough, "green" substrate layer is formed from which the required shapes can be punched out and sintered. In the green, air-drying state, the substrates are exposed to a pressure of up to approximately 1000 kp/cm2 between highly polished> plane parallel surfaces constituted by mirror finished surfaces of compression rams which may advantageously include highly polished sur- faces of synthetic material.

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