C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
204/96.34
C23C 16/26 (2006.01) C03C 17/22 (2006.01) G02B 1/10 (2006.01)
Patent
CA 1269061
- 1 - Abstract Diamond-like, transparent, clear and uncolored carbon coatings with low internal stresses are generated on substrates by plasma discharge from the gas phase. For this purpose, a hydrocarbon gas or a mixture of hydrocarbon gases and pure hydrogen, if necessary in the presence of a noble gas, are admitted onto the substrate to be coated at a temperature between room temperature and -100°C. Around the substrate an oxygen-free plasma discharge is produced by high-frequency excitation which is sustained by the gases admitted. The gases are excited, dissociated and ionized during plasma discharge and accelerated toward the substrate.
483754
Etzkorn Heinz-Werner
Ronge Werner
Battelle-Institut E.v.
Etzkorn Heinz-Werner
Kirby Eades Gale Baker
Ronge Werner
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