Process for the production of diamond-like carbon coatings

C - Chemistry – Metallurgy – 23 – C

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204/96.34

C23C 16/26 (2006.01) C03C 17/22 (2006.01) G02B 1/10 (2006.01)

Patent

CA 1269061

- 1 - Abstract Diamond-like, transparent, clear and uncolored carbon coatings with low internal stresses are generated on substrates by plasma discharge from the gas phase. For this purpose, a hydrocarbon gas or a mixture of hydrocarbon gases and pure hydrogen, if necessary in the presence of a noble gas, are admitted onto the substrate to be coated at a temperature between room temperature and -100°C. Around the substrate an oxygen-free plasma discharge is produced by high-frequency excitation which is sustained by the gases admitted. The gases are excited, dissociated and ionized during plasma discharge and accelerated toward the substrate.

483754

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