Process for the production of semiconductor materials

Details Process for the production of semiconductor materials Process for the production of semiconductor materials

C - Chemistry, Metallurgy

30

B

148/2.1

C30B 25/00 (2006.01) C23C 16/46 (2006.01) C30B 25/12 (2006.01) C30B 28/12 (2006.01) H01L 21/365 (2006.01)

Patent

CA 1292663

A PROCESS FOR THE PRODUCTION OF SEMICONDUCTOR MATERIALS ABSTRACT An improvement in a process for the production of semiconductor materials from the vapor decomposition of a precursor compound of the desired semiconductor material and the deposition of the desired semiconductor material. The improvement comprises the heating of the exterior surface of a metallic enclosure of a reactor to facilitate preheating thin rods of the semiconductor material, the rods supplying the heat for decomposition and acting as a substrate for deposition, to a temperature of about 250°C. to render the thin rods conductive enough to effectively pass an electric current.

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