Process for the production of thin molybdenum sulfide films

Details Process for the production of thin molybdenum sulfide films Process for the production of thin molybdenum sulfide films

C - Chemistry, Metallurgy

23

C

204/96.3

C23C 14/06 (2006.01) C23C 14/38 (2006.01) C23C 16/30 (2006.01)

Patent

CA 2000275

ABSTRACT OF THE DISCLOSURE The present invention relates to a process for the production of thin molybdenum sulfide films, in which the physical properties vary within a wide range and can be adjusted to the values desired, characterized in that these are deposited in the gas phase.

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