Process for the production of thin oxide coatings

Details Process for the production of thin oxide coatings Process for the production of thin oxide coatings

C - Chemistry, Metallurgy

23

C

117/85

C23C 16/40 (2006.01)

Patent

CA 2018464

ABSTRACT OF THE DISCLOSURE The present invention relates to a process for the production of thin oxide coatings by the plasma conversion of metallo- organic compounds, wherein volatile metallic compounds or mixtures of metallic compounds are used in the process.

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