B - Operations – Transporting – 01 – D
Patent
B - Operations, Transporting
01
D
23/351
B01D 53/00 (2006.01) C01B 21/083 (2006.01)
Patent
CA 1105239
227-P-US02283 PROCESS FOR THE REMOVAL OF DINITROGEN DIFLUORIDE FROM NITROGEN TRIFLUORIDE ABSTRACT OF THE DISCLOSURE This invention relates to a process for purifying a nitrogen trifluoride containing atmosphere contaminated with dinitrogen difluoride. The atmosphere is purified by heating the nitrogen trifluoride atmosphere in the presence of a particulate metal capable of defluorinating dinitrogen difluoride, but inert to nitrogen trifluoride, preferably the metal being selected from the group consisting of iron, cobalt, and nickel, to a temperature of from about 300-1000°F for a time sufficient to effect defluori- nation of the dinitrogen difluoride.
321336
Lileck John T.
Papinsick John
Steigerwalt Edward J.
Air Products And Chemicals Inc.
Macrae & Co.
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