Process gas distribution system and method with automatic...

G - Physics – 05 – B

Patent

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Details

G05B 23/00 (2006.01) G05B 15/00 (2006.01) G05D 7/06 (2006.01) H01L 21/00 (2006.01) H01L 21/306 (2006.01) H01L 21/70 (2006.01)

Patent

CA 2165847

A system including a plurality of gas flow control units in cabinets which are connected to distribute process gas, on demand, to a plurality of utilization locations known as "tool" locations in a semi-conductor manufacturing plant. Transducers are used in the system to measure pressures and other control parameters. Zero calibration of the transducers is provided by automatically subjecting each transducer to a reference computer routine to compute the difference between the standard value and the transducer output, and store the difference as an "offset" to correct the output of the transducer. Thus, re-calibration is performed simply and quickly, at a relatively low labor cost and with relatively little downtime for the system.

Système comprenant une série d'unités de commande de l'écoulement du gaz dans des coffrets, qui sont reliées afin de distribuer du gaz de fabrication, sur demande, à une série de lieux d'utilisation appelés << emplacements d'outils >> dans une usine de fabrication de semi-conducteurs. Dans le circuit, les transducteurs servent à mesurer des pressions et d'autres paramètres de commande. Le réglage à zéro des transducteurs est obtenu en soumettant chaque transducteur à un programme informatique de référence pour calculer la différence entre la valeur standard et les sorties des transducteurs, et pour stocker la différence sous forme d'un << écart >> afin de corriger la sortie du transducteur. De cette manière, le nouveau réglage est réalisé simplement et rapidement; entraîne des coûts de main-d'oeuvre relativement peu élevés et provoque un arrêt de service relativement court pour le circuit.

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