Process of formation of a ceramic coating on a substrate by...

C - Chemistry – Metallurgy – 23 – C

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C23C 14/30 (2006.01) C04B 35/488 (2006.01) C23C 14/02 (2006.01) C23C 14/08 (2006.01) C23C 14/22 (2006.01) C23C 14/24 (2006.01) C23C 14/54 (2006.01) C23C 16/02 (2006.01) C23C 28/00 (2006.01) F01D 5/28 (2006.01)

Patent

CA 2425409

A composite target is placed in a chamber (14). The target is in the form of a bar (20)made of ceramic powder and it presents composition that is not uniform in the longitudinal direction. At least one substrate (10) is introduced into the chamber in order to have formed thereon a ceramic coating with a composition gradient. The top face of the bar is swept by an electron beam so as to melt the bar material at its top face and form a vapor cloud in the chamber under low pressure. A bar (20) is used that presents a plurality of superposed layers of different compositions, with the composition within each layer being uniform over the entire cross-section of the bar. Each layer of the bar comprises zirconia and at least one oxide selected from the oxides of nickel, cobalt, iron, yttrium, hafnium, cerium, lanthanum, tantalum, niobium, scandium, samarium, gadolinium, dysprosium, ytterbium, and aluminum.

On met en pace dans une chambre (14) une cible composite en forme de barreau (20) formé de poudres céramiques et présentant une composition non uniforme en direction longitudinale, et on introduit dans la chambre au moins un substrat (10) sur lequel un revêtement céramique ayant un gradient de composition doit être formé. La face supérieure du barreau est balayée par un faisceau d'électrons afin de provoquer la fusion du matériau du barreau à sa face supérieure et la formation d'un nuage de vapeur dans la chambre sous pression réduite. On utilise un barreau (20) présentant une pluralité de couches superposées de compositions différentes, la composition étant, au sein de chaque couche, uniforme dans toute la section transversale du barreau. Chaque couche du barreau comprend de la zircone et au moins un oxyde choisi par des oxydes de nickel, de cobalt, de fer, d'yttrium, d'hafnium, de cérium, de lanthane, de tantale, de niobium, de scandium, de samarium, de gadolinium, de dysprosium, d'ytterbium et d'aluminium.

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