Process of lift-off of material

H - Electricity – 01 – F

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H01F 41/14 (2006.01) C23F 1/14 (2006.01) G11B 5/31 (2006.01) G11B 5/48 (2006.01) H01F 41/18 (2006.01) H01F 41/34 (2006.01)

Patent

CA 1213044

ABSTRACT Process for lift-off fabrication of sputtered dielec- tric or nonmagnetic gap materials and thin-film heads for either a single-element thin-film head or side-by-side el- ements on a thin-film head. The lift-off process uti- lizes a copper coating that is removed by a twenty percent solution of ammonium persulfate with a pH n the range of seven to nine to assure complete removal of gap material from the back closure of the thin-film head with- out damage to the underlying permalloy. The process can also be utilized to obtain a multiple layer deposits on a single thin-film had by repeating the steps of the pro- cess. The process provides for a clean hole, no dielec- tric on the surface nor any attacking on the magnetick material.

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