Processes for fabricating conductive patterns using...

Details Processes for fabricating conductive patterns using... Processes for fabricating conductive patterns using...

G - Physics

03

F

G03F 7/00 (2006.01) C23C 20/02 (2006.01) G03F 7/16 (2006.01) H01L 21/4763 (2006.01) H01L 21/64 (2006.01)

Patent

CA 2537023

Nanolithographic deposition of metallic nanostructures using coated tips for use in microelectronics, catalysis, and diagnostics. AFM tips can be coated with metallic precursors and the precursors patterned on substrates. The patterned precursors can be converted to the metallic state with application of heat. High resolution and excellent alignment can be achieved.

L'invention concerne le dépôt nanolithographique de nanostructures métalliques à l'aide de pointes revêtues, à utiliser pour la micro-électronique, la catalyse et le diagnostic. Les pointes AFM peuvent être revêtues de précurseurs métalliques qui sont déposés sous forme de motifs sur des substrats. On peut faire passer lesdits précurseurs sous forme de motifs à l'état métallique par application de chaleur. Grâce au procédé présenté, on peut obtenir une résolution élevée et un excellent alignement.

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