Processes for the preparation of polycrystalline diamond films

Details Processes for the preparation of polycrystalline diamond films Processes for the preparation of polycrystalline diamond films

C - Chemistry, Metallurgy

23

C

117/85, 204/96.3

C23C 16/26 (2006.01) C23C 16/02 (2006.01) C23C 16/27 (2006.01) C30B 25/02 (2006.01) C30B 29/04 (2006.01) H01L 21/48 (2006.01)

Patent

CA 1337855

A process for the preparation of continuous polycrystalline diamond films which comprises applying to a substrate diamond powder in an amount of from about one particle per ten square microns to about 10 particles per square micron with an average particle diameter of from about 0.1 to about 0.4 micron; heating the resulting powdered substrate subsequent to incorporation in a processing apparatus; introducing a mixture of gases into the chamber, which gases provide a supply of carbon and hydrogen; and decomposing the gas mixture.

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