Processing of radiation sensitive devices

Details Processing of radiation sensitive devices Processing of radiation sensitive devices

G - Physics

03

D

96/266, 95/90

G03D 3/02 (2006.01) G03F 7/30 (2006.01)

Patent

CA 1208062

ABSTRACT Improvements in or relating to the processing of radiation sensitive devices Changes occurring in the electrical conductivity of liquids used to process image-wise exposed radiation- sensitive devices are used as a measure of the deterior- ation in effectiveness of the liquids. This deterioration is compensated for by varying the processing conditions, such as temperature, time, scrubbing action and processing liquid composition, in accordance with the change in conductivity.

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