C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 4/12 (2006.01) B05D 5/00 (2006.01) H01J 37/32 (2006.01) H05H 1/32 (2006.01)
Patent
CA 2284368
The present invention relates to a method and apparatus for producing electric arc plasma and for use thereof for depositing coatings on a substrate. Electric arc separated plasma is produced using electric arc discharge on a cold cathode by passing it through a curvilinear plasmaguide. Said plasma is created within the curvilinear plasmaguide and electric current is put through it in a longitudinal direction forming length-uniform magnetic field whereby allowing a high-quality coating to be deposited on the substrate using sputtering.
Bashkov Valery Mikhaylovich
Dodonov Alexander Igorevich
Bashkov Valery Mikhaylovich
Dodonov Alexander Igorevich
Riches Mckenzie & Herbert Llp
V.i.p - Vacuum Ion Plasma Technologies Ltd.
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