C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
13/1, 117/82, 20
C23C 14/00 (2006.01) C23C 14/14 (2006.01) C23C 14/34 (2006.01)
Patent
CA 2023280
PRODUCTION METHOD OF METAL FOILS AND METAL FOILS PRODUCED BY THE METHOD ABSTRACT OF THE DISCLOSURE The present invention provides a production method of a metal foil comprising the steps of: depositing component particles from a deposition source material consisting of predetermined metal components in a vapor phase onto a substrate disposed to face the deposition source material and having an inert surface moving continuously, by a physical vapor phase deposition method in vacuum or in an inert gas atmosphere so as to form sequentially a thin film having a predetermined film thickness; and peeling off the thin film from the substrate surface to obtain a metal foil. The metal foils thus obtained may be in the state of an amorphous phase, a crystalline phase or a composite thereof by adjusting the gas pressure inside the apparatus, the distance between the substrate surface and the deposition source material, etc. Particularly, metal foils having at least 50 vol. % of an amorphous phase or a surface roughness (Rmax) not greater than 0.2 um are very useful for various industrial applications because of their superior properties.
Nagahora Junichi
Yamagata Hiroshi
Gowling Lafleur Henderson Llp
Ykk Corporation
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