C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
32/23, 356/29, 1
C23C 14/08 (2006.01) C04B 35/45 (2006.01) C23C 14/22 (2006.01) C23C 14/32 (2006.01) H01B 12/00 (2006.01) H01L 39/24 (2006.01)
Patent
CA 1287527
Abstract: A superconductive thin film is made by a procedure as follows: in a vacuum vessel having an internal pressure maintained at least as low as 10-2 torr, each metal of the component elements of the superconductive thin film is charged into a crucible to be heated. The resulting evaporated metallic element is spouted from the crucible as a cluster beam. Each spouted metallic stream is ionized and accelerated by an electric field and impinges on a substrate. Oxygen gas is directed towards the substrate. The heating of the crucibles is so controlled that the amounts of the respective metallic streams are in accordance with a predetermined mole ratio. In this way there is formed on the substrate a superconductive thin film having improved properties of adhesion, and the manufacturing procedure is simplified.
562760
Kirby Eades Gale Baker
Sumitomo Electric Industries Ltd.
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