Production of high purity hydrochloric acid

Details Production of high purity hydrochloric acid Production of high purity hydrochloric acid

C - Chemistry, Metallurgy

01

B

C01B 7/07 (2006.01) C01B 7/03 (2006.01) H01L 21/00 (2006.01)

Patent

CA 2387584

The invention relates to a novel method, which can be carried out according to industrial standards, for producing high-purity hydrochloric acid with a very low particle content, for use in the production of semiconductors.

Nouveau procédé, pouvant être mis en oeuvre à l'échelle industrielle, de préparation d'acide chlorhydrique extrêmement pur et pauvre en particules destiné à être utilisé dans la fabrication de semi-conducteurs

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