Production of metallic structures on inorganic non-conductors

Details Production of metallic structures on inorganic non-conductors Production of metallic structures on inorganic non-conductors

C - Chemistry, Metallurgy

04

B

204/96.07, 204/9

C04B 41/51 (2006.01) C04B 41/88 (2006.01) C23C 14/04 (2006.01) C23C 16/04 (2006.01) H01L 21/48 (2006.01) H05K 3/02 (2006.01)

Patent

CA 1290720

ABSTRACT OF THE DISCLOSURE The invention provides a process for the production of metallic structures on inorganic, non-conducting surfaces of substrates in which the desired structure is produced on the surface of a substrate using a covering material such as a mask or lacquer; the so treated surface of the substrates is exposed to reactive gases containing a halogen in a glow discharge zone; the covering material is removed from the surface after comple- tion of the reaction; the substrate is metallized by conventional physical methods; to produce the desired structure and the sub- strate is placed in water or aqueous solutions of complexers, acids, alkalis or substances that dissolve the resulting metal- halide compound after the metallization.

506656

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