Production of silicon metal from dichlorosilane

Details Production of silicon metal from dichlorosilane Production of silicon metal from dichlorosilane

H - Electricity

01

J

23/326

H01J 9/20 (2006.01) C01B 33/02 (2006.01) C23C 16/24 (2006.01) C30B 25/02 (2006.01)

Patent

CA 959631

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