Pumping device by non-vaporisable getter and method for...

Details Pumping device by non-vaporisable getter and method for... Pumping device by non-vaporisable getter and method for...

H - Electricity

01

J

H01J 7/18 (2006.01)

Patent

CA 2258118

The invention discloses a pumping device by non-vaporisable getter to create a very high vacuum in a chamber defined by a metal wall capable of releasing gas at its surface, characterised in that it comprises a thin layer of non-vaporisable getter coated on at least almost the whole metal wall surface defining the chamber.

Dispositif de pompage par getter non évaporable pour créer un vide très poussé dans une enceinte définie par une paroi métallique susceptible de relâcher du gaz à sa surface, caractérisé en ce qu'il comprend une couche mince de getter non évaporable déposée sur au moins la quasi totalité de la surface de la paroi métallique définissant l'enceinte.

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