G - Physics – 01 – J
Patent
G - Physics
01
J
73/112, 15/38, 7
G01J 5/08 (2006.01) G01J 5/04 (2006.01) G03F 7/20 (2006.01)
Patent
CA 1300927
ABSTRACT OF THE DISCLOSURE A radiation instrument has a purging air flow system for passing air over the lens to keep it clean and free from particulate contaminants and also for providing a positive flow of air away from the lens . The air supply used for such purging is controlled adequately 80 the flow changes direction and particles are removed from the main flow of purge air by inertial separation prior to the time the air contacts the lens . Such air entrained particles might otherwise deposit on the lens A flow control orifice provides a secondary flow to carry the particles separated from the main flow out of the flow passageway .
529407
Christensen Charles L.
Miller Larry V.
Myhre Douglas C.
Pui David Y.h.
Marks & Clerk
Rosemount Inc.
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