Purification of electronic specialty gases by vapor phase...

Details Purification of electronic specialty gases by vapor phase... Purification of electronic specialty gases by vapor phase...

F - Mech Eng,Light,Heat,Weapons

25

J

F25J 3/08 (2006.01)

Patent

CA 2227715

A system and method for purifying liquefied corrosive gases of metallic impurities is described. The principle for this purification method relies on vapor-phase transfilling the vapor phase from a source container into a receiving container. This method has been observed to decrease metal concentrations by a factor of at least 1000 and decreases the metallic impurity levels in the resulting condensate. The vapor transfer is accomplished by controlled differential pressure rather than mechanical pumping, thereby generating no particle or metal impurities.

Système et méthode servant à purifier les gaz corrosifs liquéfiés des impuretés métalliques. Cette méthode de purification repose sur le transvidage, en phase vapeur, des gaz du contenant source au contenant de réception. Les observations ont montré que cette méthode permet de réduire les concentrations de métal d'un facteur d'au moins 1000 et de diminuer les niveaux des impuretés métalliques dans le condensat obtenu. Le transfert de la vapeur se fait par pression différentielle contrôlée plutôt que par pompage mécanique, ce qui empêche de produire des impuretés métalliques ou des particules.

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