Purification of nitrogen trifluoride atmosphere

Details Purification of nitrogen trifluoride atmosphere Purification of nitrogen trifluoride atmosphere

B - Operations, Transporting

01

D

23/353

B01D 53/02 (2006.01) C01B 21/083 (2006.01)

Patent

CA 1104794

227-P-US02381 PURIFICATION OF NITROGEN TRIFLUORIDE ATMOSPHERES ABSTRACT OF THE DISCLOSURE This invention relates to an improvement in a process for purifying nitrogen frifluoride atmospheres generally contami- nated with nitrous oxide, water, and dinitrogen difluoride. The improvement for extending adsorber life resides in reducing the dinitrogen difluoride content in the atmosphere to less than 0.03% by volume prior to passing the atmosphere through the adsorber.

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