F - Mech Eng,Light,Heat,Weapons – 25 – J
Patent
F - Mech Eng,Light,Heat,Weapons
25
J
162/107
F25J 3/02 (2006.01) B01D 3/14 (2006.01) C01B 21/083 (2006.01)
Patent
CA 2345873
The process recovers NF3 from a multicomponent fluid containing NF3, one or more components less volatile than NF3, and one or more components more volatile than NF3. The process uses a first distillation column and a second distillation column, each distillation column having a top and a bottom. The process includes the following steps: feeding the multicomponent fluid to the first distillation column at a first feed location below the top of the first distillation column; feeding a cryogenic liquid to the first or second distillation column adjacent the top of the first or second distillation column; withdrawing a mixture containing NF3 from the first distillation column; feeding the mixture to the second distillation column at a second feed location; separating NF3 from the mixture in the second distillation column; and removing a stream of NF3 from the second distillation column.
Agrawal Rakesh
Auvil Steven Ray
Cirucci John Frederick
Fidkowski Zbigniew Tadeusz
Suchdeo Shyam Ramchand
Air Products And Chemicals Inc.
Mcfadden Fincham
LandOfFree
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