G - Physics – 01 – J
Patent
G - Physics
01
J
345/14
G01J 1/00 (2006.01) G01J 5/34 (2006.01) H01L 37/02 (2006.01)
Patent
CA 1175130
- 12 - PYROELECTRIC DETECTOR AND METHOD FOR MANUFACTURING THE SAME ABSTRACT A device for detecting infrared rays using the pyroelectric effect, namely a pyroelectric detector, and methods for manufacturing the pyroelectric detector, are disclosed The pyroelectric detector comprises a pyroelectric material, an electrode for receiving infrared rays placed on one face of the pyroelectric material, a shield electrode placed at the other face of the pyroelectric material, a substrate made of a semiconductor or conductive material which is fastened to the shield electrode, the substrate having a hole corresponding in position to the position of the infrared receiving electrode and a stand to which the substrate is fastened. The method for manufacturing the pyroelectric detector comprises the steps of forming a shield electrode at one face of a pyroelectric wafer, making holes in a substrate, fastening the substrate to the shield electrode, grinding the other of the wafer, forming electrodes on the other face of the wafer for receiving infrared rays, the position of the electrodes corresponding to the position of the holes, and dicing the pyroelectric material between the holes to form a single pyroelectric detector.
360797
Fukuta Katsuyoshi
Hirano Hitoshi
Matsumura Sadao
Sim & Mcburney
Tokyo Shibaura Denki Kabushiki Kaisha
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