Pyrogenic oxides and a process for their preparation

Details Pyrogenic oxides and a process for their preparation Pyrogenic oxides and a process for their preparation

C - Chemistry, Metallurgy

01

B

C01B 13/18 (2006.01) C01B 33/18 (2006.01) C09K 3/14 (2006.01)

Patent

CA 2227709

Pyrogenic oxides having a BET surface area of between 30 and 150 m2/g have a viscosity of less than 2,500 mPas in an aqueous suspension. They are prepared by setting the hydrogen ratio gamma and the oxygen ratio lambda to less than one in high-temperature flame hydrolysis. The pyrogenic oxides are employed in the CMP application in the electronics industry.

Oxydes pyrogéniques ayant une surface BET comprise entre 30 et 150 m2/g et ayant une viscosité de moins de 2 500 mPas dans une suspension aqueuse. Ils sont préparés en réglant le rapport d'hydrogène gamma et le rapport d'oxygène lambda à moins de l'unité dans une hydrolyse à la flamme à haute température. Les oxydes pyrogéniques sont utilisés pour l'application CMP dans l'industrie électronique.

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