Quadrupole electrode and process for producing the same

H - Electricity – 01 – J

Patent

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H01J 49/26 (2006.01) H01J 49/42 (2006.01)

Patent

CA 2085729

The present invention relates to improvement of a quadrupole electrode for use in a mass spectrometer or the like, in which two pairs of electrode rods 1, 2, 3 and 4 formed in such a manner that the section of the opposed face of each rod is hyperbolic or circular, and each electrode rod is made of a ceramic and the surface of the electrode is coated with a coating layer 5 of a conductive metal. Further, the present invention relates to a production process, characterized by incorporating such four electrodes at predetermined intervals. Since the electrodes are mainly made of a ceramic which is easily formable with a high dimensional accuracy, the adjustment of the positional relationship between the electrodes during assembling can be made without much effort, which enables a quadrupole electrode having a high performance to be provided with a good reproducibility at a low cost.

La présente invention se rapporte à une électrode quadripôle de version améliorée, laquelle est destinée à utilisation dans un spectromètre de masse ou un autre appareil semblable, où deux paires de baguettes d'électrodes (1, 2, 3 et 4) sont formées de telle sorte que la section de la face opposée de chacune des baguettes est hyperbolique ou circulaire, et chaque baguette d'électrode est fabriquée de céramique, la surface de l'électrode étant recouverte d'une couche (5) d'un métal conducteur. La présente invention vise en outre un procédé de fabrication qui se caractérise par l'incorporation des quatre électrodes selon un espacement prédéterminé. Les quatre électrodes étant composées essentiellement d'un matériau céramique se prêtant au formage à haute précision dimensionnelle, le réglage de la position relative des électrodes durant l'assemblage peut être effectué sans difficulté, ce qui autorise la production d'une électrode quadripôle à haut rendement dans des conditions de bonne reproductibilité, et à faible coût.

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