Quantitative compositional analyser for use with scanning...

Details Quantitative compositional analyser for use with scanning... Quantitative compositional analyser for use with scanning...

H - Electricity

01

J

358/10.1

H01J 37/28 (2006.01) G01N 23/203 (2006.01) H01J 37/256 (2006.01)

Patent

CA 1205580

ABSTRACT An analysis system for a scanning electron microscope having a backscattered electron detector. The output of the detector is amplified, processed by an analogue to digital converter, mutli-channel analyser, and digital conversion and processing circuit to generate a signal indicative of the atomic number factor of the specimen. Calculation of stoichiometric valence combinations of non-elemental specimens is also disclosed. A calibration device is also disclosed.

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