Quantitative determination method of chemicals for...

Details Quantitative determination method of chemicals for... Quantitative determination method of chemicals for...

G - Physics

01

N

73/55

G01N 21/25 (2006.01) G01N 21/35 (2006.01) G01N 21/31 (2006.01)

Patent

CA 2025766

- 29 - ABSTRACT The present invention relates to a quantitative determination method of a medicament for processing semiconductor by near-infrared spectrometry at 800 - 1400 nm and an apparatus which is adapted to the practice of said method. According to the present invention, concentration of an aqueous solution of the medicament can be determined without drawbacks of the prior methods.

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