Quantum efficiency improvements in active pixel sensors

Details Quantum efficiency improvements in active pixel sensors Quantum efficiency improvements in active pixel sensors

H - Electricity

01

L

H01L 27/146 (2006.01) H01L 21/77 (2006.01)

Patent

CA 2485328

Quantum efficiency in an active pixel sensor improved by proper sizing and shaping of the contacts. The photodiode elements are formed of special shapes that are optimized for obtaining diffusion of charge, rather than obtaining the charge directly. Photogates are formed with a thinned polysilicon covering

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