Quantum efficiency improvements in active pixel sensors

Details Quantum efficiency improvements in active pixel sensors Quantum efficiency improvements in active pixel sensors

H - Electricity

01

L

H01L 31/0352 (2006.01) H01L 27/146 (2006.01)

Patent

CA 2461093

Quantum efficiency in an active pixel sensor improved by proper sizing and shaping of the contacts. The photodiode elements are formed of special shapes that are optimized for obtaining diffusion of charge, rather than obtaining the charge directly. Photogates are formed with a thinned polysilicon covering

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