H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/200
H01L 41/00 (2006.01) B28D 5/00 (2006.01) H01L 41/22 (2006.01) H03H 3/02 (2006.01)
Patent
CA 1162658
ABSTRACT OF THE DISCLOSURE Disclosed is a single chamber ultra-high vacuum processing system for the production of hermetically sealed quartz resonators wherein electrode metallization and sealing are carried out along with cleaning and bake-out without any air exposure between the processing steps. The system includes a common vacuum chamber in which is located a rotatable wheel-like member which is adapted to move a plurality of individual component sets of a flat pack resonator unit past discretely located processing stations in said chamber whereupon electrode deposition takes place followed by the placement of ceramic covers over a frame containing a resonator element and then to a sealing stage where a pair of hydraulic rams including heating elements effect a metallized bonding of the covers to the frame.
382896
Aspila Kalevi P.
The Government Of The United States As Represented By The Secret
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