Radiation beam position sensor

Details Radiation beam position sensor Radiation beam position sensor

G - Physics

01

J

G01J 5/00 (2006.01) B23K 26/04 (2006.01) G01J 1/42 (2006.01) G01J 5/02 (2006.01) G01J 5/10 (2006.01) G01J 5/12 (2006.01) H01S 3/10 (2006.01)

Patent

CA 2187339

An apparatus for detecting the position of a primary beam of elec- tromagnetic radiation, the apparatus including a leaky mirror for reflect- ing the primary beam and for extract- ing from the primary beam a sec- ondary team and a position sensitive detector for detecting the spatial posi- tion of the secondary beam, wherein the leaky mirror comprises a material which has a transmissivity of less than 0.2 for the radiation of the primary beam and the position sensitive de- tector is arranged in the path of the secondary beam after transmission by the leaky mirror, the position of the secondary beam providing a measure of the position of the primary beam.

Appareil destiné à détecter la position d'un faisceau primaire de rayonnement électromagnétique, cet appareil comprenant un miroir à forte fuite destiné à réfléchir ce faisceau primaire et à extraire de celui-ci un faisceau secondaire, ainsi qu'un capteur sensible à la position, destiné à détecter la position spatiale du faisceau secondaire; le miroir est composé d'un matériau possédant une transmissivité inférieure à 0,2 pour le rayonnement du faisceau primaire, et le capteur est placé dans le trajet du faisceau secondaire après transmission par le miroir non étanche, la position du faisceau secondaire donnant une mesure de la position du faisceau primaire.

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