Radiation deflector assembly

Details Radiation deflector assembly Radiation deflector assembly

G - Physics

02

B

345/57

G02B 26/02 (2006.01) G02B 6/35 (2006.01) G02B 26/08 (2006.01)

Patent

CA 1315379

ABSTRACT RADIATION DEFLECTOR ASSEMBLY A micromechanical cantilever beam (1) for use in an optical switch or other radiation deflector assembly includes a beam portion (2) comprising two parallel arms (5,6) hinged at one end to a supporting substrate (4) and at the other end to a load portion (3) which provides the major proportion of the total mass of the cantilever beam. The beam is deflected by the application of an electrostatic potential between electrodes on opposing surfaces (8,9) of the load portion and the supporting substrate respectively. This structure has improved switching performance in operation.

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