Radiation heated acceleration

Details Radiation heated acceleration Radiation heated acceleration

H - Electricity

01

J

358/22

H01J 3/00 (2006.01) H01J 37/08 (2006.01) H01J 37/09 (2006.01)

Patent

CA 1091363

RADIATION HEATED ACCELERATION Abstract of the Disclosure In an ion implantation apparatus, a beam defining member such as the acceleration plate is constructed such that the member is maintained at a temperature above the condensation point of the vapor emanating from the source of charged particles, thereby preventing the vapor from condensing on the member and providing a self-cleaning effect.

310045

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