G - Physics – 03 – F
Patent
G - Physics
03
F
96/160, 96/219
G03F 7/08 (1980.01)
Patent
CA 1181627
Abstract: The invention relates to a radiation-sensitive composition comprising a polymer and an iodine-containing azide compound, at least a part of which can be fixed substantially in the polymer by exposure to a radiation, or a radiation-sensitive composition comprising a polymer, an azide compound, and an iodine compound, at least a part of which can be fixed substantially in the polymer by exposure to a radiation. This composition can be subjected to dry development with oxygen plasma after the exposure to radiation followed by heating.
455393
Iwayanagi Takao
Kohashi Takahiro
Nonogaki Saburo
Shiraishi Hiroshi
Ueno Takumi
Hitachi Ltd.
Kirby Eades Gale Baker
LandOfFree
Radiation-sensitive composition containing an azide compound... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Radiation-sensitive composition containing an azide compound..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Radiation-sensitive composition containing an azide compound... will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-1287896