G - Physics – 03 – F
Patent
G - Physics
03
F
96/160, 96/219
G03F 7/008 (2006.01)
Patent
CA 1176903
Abstract: The invention relates to a radiation-sensitive composition comprising a polymer and an iodine-containing azide compound, at least a part of which can be fixed substantially in the polymer by exposure to a radiation, or a radiation-sensitive composition comprising a polymer, an azide compound, and an iodine compound, at least a part of which can be fixed substantially in the polymer by exposure to a radiation. This composition can be subjected to dry development with oxygen plasma after the exposure to radiation followed by heating.
407336
Iwayanagi Takao
Kohashi Takahiro
Nonogaki Saburo
Shiraishi Hiroshi
Ueno Takumi
Hitachi Ltd.
Kirby Eades Gale Baker
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